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Fast and Versatile Multiscale Patterning by Combining Template-Stripping with Nanotransfer Printing
ETH, Switzerland.
Linköping University, Department of Science and Technology, Physics and Electronics. Linköping University, Faculty of Science & Engineering. ETH, Switzerland.ORCID iD: 0000-0002-9845-446X
ETH, Switzerland.
ETH, Switzerland.
2018 (English)In: ACS Nano, ISSN 1936-0851, E-ISSN 1936-086X, Vol. 12, no 3, p. 2514-2520Article in journal (Refereed) Published
Abstract [en]

Metal nanostructures are widely used in plasmonic and electronic applications due to their inherent properties. Often, the fabrication of such nanostructures is limited to small areas, as the processing is costly, low throughput, and comprises harsh fabrication conditions. Here, we introduce a template-stripping based nanotransfer printing method to overcome these limitations. This versatile technique enables the transfer of arbitrary thin film metal structures onto a variety of substrates, including glass, Kapton, silicon, and PDMS. Structures can range from tens of nanometers to hundreds of micrometers over a wafer scale area. The process is organic solvent-free, multilayer compatible, and only takes minutes to perform. The stability of the transferred gold structures on glass exceeds by far those fabricated by e-beam evaporation. Therefore, an adhesion layer is no longer needed, enabling a faster and cheaper fabrication as well as the production of superior nanostructures. Structures can be transferred onto curved substrates, and the technique is compatible with roll-to-roll fabrication; thus, the process is suitable for flexible and stretchable electronics.

Place, publisher, year, edition, pages
AMER CHEMICAL SOC , 2018. Vol. 12, no 3, p. 2514-2520
Keywords [en]
template-stripping; plasmonics; nanowire array; nanotransfer printing; nanofabrication; multiscale
National Category
Materials Chemistry
Identifiers
URN: urn:nbn:se:liu:diva-147425DOI: 10.1021/acsnano.7b08290ISI: 000428972600044PubMedID: 29480710OAI: oai:DiVA.org:liu-147425DiVA, id: diva2:1206590
Note

Funding Agencies|ETH Zurich; Swiss National Science Foundation as part of the NCCR Molecular Systems Engineering; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University (Faculty Grant SFO Mat LiU) [2009 00971]

Available from: 2018-05-17 Created: 2018-05-17 Last updated: 2018-05-17

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