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Low-energy ion irradiation in HiPIMS to enable anataseTiO(2) selective growth
Univ Paris Saclay, France.
Tokyo Metropolitan Univ, Japan.
Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics. Linköping University, Faculty of Science & Engineering.
Univ Estadual Campinas, Brazil.
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2018 (English)In: Journal of Physics D: Applied Physics, ISSN 0022-3727, E-ISSN 1361-6463, Vol. 51, no 23, article id 2353011Article in journal (Refereed) Published
Abstract [en]

High power impulse magnetron sputtering (HiPIMS) has already demonstrated great potential for synthesizing the high-energy crystalline phase of titanium dioxide (rutile Ti-O2) due to large quantities of highly energetic ions present in the discharge. In this work, it is shown that the metastable anatase phase can also be obtained by HiPIMS. The required deposition conditions have been identified by systematically studying the phase formation, microstructure and chemical composition as a function of mode of target operation as well as of substrate temperature, working pressure, and peak current density. It is found that films deposited in the metal and transition modes are predominantly amorphous and contain substoichiometric TiOx compounds, while in compound mode they are well-crystallized and present only O2- ions bound to Ti4+, i.e. pure TiO2. Anatase TiO2 films are obtained for working pressures between 1 and 2 Pa, a peak current density of similar to 1 A cm(-2) and deposition temperatures lower than 300 degrees C. Rutile is favored at lower pressures (amp;lt; 1 Pa) and higher peak current densities (amp;gt;2 A cm(-2)), while amorphous films are obtained at higher pressures (greater than or similar to 5 Pa). Microstructural characterization of selected films is also presented.

Place, publisher, year, edition, pages
IOP PUBLISHING LTD , 2018. Vol. 51, no 23, article id 2353011
Keywords [en]
titanium dioxide; anatase; HiPIMS; magnetron sputtering; thin film
National Category
Inorganic Chemistry
Identifiers
URN: urn:nbn:se:liu:diva-148636DOI: 10.1088/1361-6463/aac080ISI: 000433066600001OAI: oai:DiVA.org:liu-148636DiVA, id: diva2:1220050
Note

Funding Agencies|French National Center for Scientific Research (CNRS); Brazilian National Council of Scientific and Technological Development (CNPq, Ciencia sem Fronteiras) [233194/2014-2]; FAPESP [2012/10127-5]; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University [SFO-Mat-LiU, 2009-00971]; Swedish Research Council [VR 621-2014-4882]

Available from: 2018-06-18 Created: 2018-06-18 Last updated: 2018-06-18

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