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A study on the effects of the process parameters of polymerised HMDSO using RF-PECVD in corrosion protection applications
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics.
2017 (English)Independent thesis Advanced level (degree of Master (Two Years)), 20 credits / 30 HE creditsStudent thesis
Abstract [en]

In this master thesis the effects of the process parameters of pp-HMDSO were studied in the application of corrosion protection of an Al surface. The method for polymerising the HMDSO vapour was RF-PECVD. The following process parameters were studied: RF-power, flow of HMDSO, Oxygen as reactive gas, Ar as inert gas, the effect of applied bias voltage, as well as Ar etch as pre-treatment and subjecting the film to a pure O2 plasma as post-treatment. The results were a prolonging of the total decay time of the Al film when subjected to a 1M NaOH solution. The decay time increased from 5-20s for an unprotected Al film to 140min for the best pp-HMDSO coating. SEM/EDX, XRR, L*a*b* were used when analysing the pp-HMDSO films. The best performing coatings were tested on reflectors and passed the industry standard test of being subjected to a 0.1M NaOH for 5min without visible corrosion or decay.

Place, publisher, year, edition, pages
2017. , p. 116
National Category
Nano Technology
Identifiers
URN: urn:nbn:se:liu:diva-149909ISRN: LITH-IFM-A-EX—17/3408—SEOAI: oai:DiVA.org:liu-149909DiVA, id: diva2:1236373
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Subject / course
Physics
Presentation
2017-06-02, Röntgen, Linköpings universitet, Linköping, 14:00 (English)
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Available from: 2018-08-14 Created: 2018-08-02 Last updated: 2018-08-14Bibliographically approved

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CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf