Optical and microstructural investigation of heavy B-doping effects in sublimation-grown 3C-SiCShow others and affiliations
2018 (English)In: Materials Science Forum, Trans Tech Publications Ltd , 2018, Vol. 924 MSF, p. 221-224Conference paper, Published paper (Refereed)
Abstract [en]
In this work, a complementary microstructural and optical approach is used to define processing conditions favorable for the formation of deep boron-related acceptor centers that may provide a pathway for achieving an intermediate band behavior in highly B-doped 3C-SiC. The crystallinity, boron solubility and precipitation mechanisms in sublimation-grown 3C-SiC crystals implanted to 1-3 at.% B concentrations were investigated by STEM. The revealed defect formation and boron precipitation trends upon thermal treatment in the range 1100-2000oC have been crosscorrelated with the optical characterization results provided by imaging PL spectroscopy. We discuss optical activity of the implanted B ions in terms of both shallow acceptors and deep D-centers, a complex formed by a boron atom and a carbon vacancy, and associate the observed spectral developments upon annealing with the strong temperature dependence of the D-center formation efficiency, which is further enhanced by the presence of implantation-induced defects. © 2018 Trans Tech Publications, Switzerland.
Place, publisher, year, edition, pages
Trans Tech Publications Ltd , 2018. Vol. 924 MSF, p. 221-224
Keywords [en]
3C-SiC; Boron doping; Defects; Implantation; Photoluminescence; STEM
National Category
Condensed Matter Physics
Identifiers
URN: urn:nbn:se:liu:diva-149994DOI: 10.4028/www.scientific.net/MSF.924.221Scopus ID: 2-s2.0-85049052625ISBN: 9783035711455 (print)OAI: oai:DiVA.org:liu-149994DiVA, id: diva2:1236843
Conference
International Conference on Silicon Carbide and Related Materials, ICSCRM 2017
Note
Funding agencies:The authors gratefully acknowledge the financial support of this work by the Research Council of Norway (SunSiC Proj. No. 461224 22971), Swedish Energy Agency, Swedish Research Council (Proj. No. 621-2014-5825) and Swedish Governmental Agency for Innovation Systems (Vinnova).
2018-08-062018-08-062021-12-29