We have systematically investigated low-frequency noise (LFN) in InAs films with several thicknesses (≃10-100 nm) bonded on low-k flexible substrates (InAs/FS), comparing with that in InAs films epitaxially grown on GaAs(001) substrates (InAs/GaAs). We obtain current LFN spectra exhibiting approximate 1/f characteristics and consequent effective Hooge parameters α depending on the thickness, where we find that α in the InAs/FS is larger than that in the InAs/GaAs. The behavior of α can be attributed to the fluctuation of the electron mobility dominated by surface/interface charge scattering and by thickness fluctuation scattering. [ABSTRACT FROM AUTHOR]