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Ion-assisted magnetron sputter deposition of B4C doped Ni/Ti multilayer mirrors
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
Helmholtz Zentrum Geesthacht, Germany.
Helmholtz Zentrum Geesthacht, Germany.
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2018 (English)In: ADVANCES IN X-RAY/EUV OPTICS AND COMPONENTS XIII, SPIE-INT SOC OPTICAL ENGINEERING , 2018, Vol. 10760, article id UNSP 1076006Conference paper, Published paper (Refereed)
Abstract [en]

Ion-assisted magnetron sputter deposition have been used to deposit Ni/Ti multilayer neutron mirrors. Improved interface widths were obtained by using B4C doping, to eliminate nanocrystallites by amorphization, and a two-stage modulated ion assistance, to obtain abrupt and smooth interfaces. In situ high-energy wide angle X-ray scattering during multilayer depositions was used to monitor the microstructure evolution and to determine the most favourable growth conditions. Post growth X-ray reflectometry in combination with high resolution transmission electron microscopy confirmed the amorhization and revealed significant improvements in interface widths and reduction of kinetic roughening upon applying B4C doping and modulated ion assistance during growth. Significant improvement of neutron supermirror performance is predicted by employing this technique.

Place, publisher, year, edition, pages
SPIE-INT SOC OPTICAL ENGINEERING , 2018. Vol. 10760, article id UNSP 1076006
Series
Proceedings of SPIE, ISSN 0277-786X
Keywords [en]
Neutron mirror; neutron reflectivity; multilayer; magnetron sputtering
National Category
Inorganic Chemistry
Identifiers
URN: urn:nbn:se:liu:diva-153720DOI: 10.1117/12.2317742ISI: 000452663800004ISBN: 978-1-5106-2092-6 (print)OAI: oai:DiVA.org:liu-153720DiVA, id: diva2:1276166
Conference
Conference on Advances in X-Ray/EUV Optics and Components XIII
Available from: 2019-01-07 Created: 2019-01-07 Last updated: 2019-01-07

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Eriksson, FredrikGhafoor, NaureenBirch, Jens
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Inorganic Chemistry

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CiteExportLink to record
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Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
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  • Other style
More styles
Language
  • de-DE
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  • nn-NB
  • sv-SE
  • Other locale
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Output format
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