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Thermal chemical vapor deposition of epitaxial rhombohedral boron nitride from trimethylboron and ammonia
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
Linköping University, Department of Physics, Chemistry and Biology, Chemistry. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0002-7171-5383
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, Faculty of Science & Engineering.
2019 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 37, no 2, article id 020603Article in journal (Refereed) Published
Abstract [en]

Epitaxial rhombohedral boron nitride (r-BN) films were deposited on alpha-Al2O3(001) substrates by chemical vapor deposition, using trimethylboron, ammonia, and a low concentration of silane in the growth flux. The depositions were performed at temperatures from 1200 to 1485 degrees C, pressures from 30 to 90 mbar, and N/B ratios from 321 to 1286. The most favorable conditions for epitaxy were a temperature of 1400 degrees C, N/B around 964, and pressures below 40 mbar. Analysis by thin film x-ray diffraction showed that most deposited films were polytype-pure epitaxial r-BN with an out-of-plane epitaxial relationship of r-BN[001] parallel to w-AlN[001] parallel to alpha-Al2O3[001] and with two in-plane relationships of r-BN[110] parallel to w-AlN[110] parallel to alpha-Al2O3[100] and r-BN[110] parallel to w-AlN[110] parallel to alpha-Al2O3[(1) over bar 00] due to twinning. Published by the AVS.

Place, publisher, year, edition, pages
A V S AMER INST PHYSICS , 2019. Vol. 37, no 2, article id 020603
National Category
Inorganic Chemistry
Identifiers
URN: urn:nbn:se:liu:diva-155543DOI: 10.1116/1.5085192ISI: 000460437200003OAI: oai:DiVA.org:liu-155543DiVA, id: diva2:1299397
Note

Funding Agencies|Swedish Foundation for Strategic Research (SSF) [IS14-0027]; Swedish Government Strategic Research Area in Materials Science on Advanced Functional Materials at Linkoping University [2009-00971]

Available from: 2019-03-26 Created: 2019-03-26 Last updated: 2019-03-26

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Souqui, LaurentPedersen, HenrikHögberg, Hans
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