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Methylamines as Nitrogen Precursors in Chemical Vapor Deposition of Gallium Nitride
Linköping University, Department of Physics, Chemistry and Biology, Chemistry. Linköping University, Faculty of Science & Engineering.
Carleton Univ, Canada.
Linköping University, Department of Physics, Chemistry and Biology, Chemistry. Linköping University, Faculty of Science & Engineering.
Carleton Univ, Canada.
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2019 (English)In: The Journal of Physical Chemistry C, ISSN 1932-7447, E-ISSN 1932-7455, Vol. 123, no 11, p. 6701-6710Article in journal (Refereed) Published
Abstract [en]

Chemical vapor deposition (CVD) is one of the most important techniques for depositing thin films of the group 13 nitrides (13-Ns), AIN, GaN, InN, and their alloys, for electronic device applications. The standard CVD chemistry for 13-Ns uses ammonia as the nitrogen precursor; however, this gives an inefficient CVD chemistry, forcing N/13 ratios of 100/1 or more. Here, we investigate the hypothesis that replacing the N-H bonds in ammonia with weaker N-C bonds in methylamines will permit better CVD chemistry, allowing lower CVD temperatures and an improved N/13 ratio. Quantum chemical computations show that while the methylamines have a more reactive gas-phase chemistry, ammonia has a more reactive surface chemistry. CVD experiments using methylamines failed to deposit a continuous film, while instead micrometer-sized gallium droplets were deposited. This study shows that the nitrogen surface chemistry is most likely more important to be considered than the gas-phase chemistry when searching for better nitrogen precursors for 13-N CVD.

Place, publisher, year, edition, pages
AMER CHEMICAL SOC , 2019. Vol. 123, no 11, p. 6701-6710
National Category
Inorganic Chemistry
Identifiers
URN: urn:nbn:se:liu:diva-156198DOI: 10.1021/acs.jpcc.9b00482ISI: 000462260700044OAI: oai:DiVA.org:liu-156198DiVA, id: diva2:1303238
Note

Funding Agencies|Swedish foundation for Strategic Research [SSF-RMA 15-0018]; Vinnova VINNMER Marie Curie incoming mobility program [2015-03714]; COST (European Cooperation in Science and Technology) [MP1402]; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University (Faculty Grant SFO Mat LiU) [2009 00971]

Available from: 2019-04-09 Created: 2019-04-09 Last updated: 2019-05-13

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The full text will be freely available from 2020-02-28 08:58
Available from 2020-02-28 08:58

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