Stability limits of superlattice growth: The case of Cr/V (001)
2008 (English)In: THIN SOLID FILMS, ISSN 0040-6090 , Vol. 516, no 23, 8468-8472 p.Article in journal (Refereed) Published
The crystalline quality of bet CrN (001) superlattices is found to be strongly dependent on the thickness ratio of the constituents. The out-of-plane coherence length varies from 275 A to 880 angstrom, corresponding to 30% and close to 100% of the total film thicknesses, which was kept the same for all the samples. The width of the rocking curve (mosaicity) varies as much as from below 0.02 degrees to 0.8 degrees. Using an adaptation of the Matthews-Blakeslee theory for critical thickness, we define a parameter window available for the growth of superior Cr/V (001) superlattices.
Place, publisher, year, edition, pages
2008. Vol. 516, no 23, 8468-8472 p.
Superlattices, Multilayers, Epitaxial growth, Magnetron sputtering
National CategoryNatural Sciences
IdentifiersURN: urn:nbn:se:liu:diva-16089DOI: 10.1016/j.tsf.2008.04.097OAI: oai:DiVA.org:liu-16089DiVA: diva2:133134