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Recent progress in silicon carbide field effect gas sensors
Linköping University, Department of Physics, Chemistry and Biology, Sensor and Actuator Systems. Linköping University, Faculty of Science & Engineering.
Linköping University, Department of Physics, Chemistry and Biology, Sensor and Actuator Systems. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0002-2817-3574
Linköping University, Department of Physics, Chemistry and Biology, Sensor and Actuator Systems. Linköping University, Faculty of Science & Engineering.
2020 (English)In: Semiconductor gas sensors / [ed] Raivo Jaaniso and Ooi Kiang Tan, Oxford: Woodhead Publishing Limited, 2020, 2, p. 309-346Chapter in book (Refereed)
Abstract [en]

The introduction of silicon carbide as the semiconductor in gas-sensitive field effect devices has disruptively improved this sensor platform extending the operation temperature to more than 600 °C with an increased number of detectable gases. Here, we review recent progress in research and applications, starting with transducer and detection mechanisms, presenting new material combinations as sensing layers for improved selectivity and detection limits down to subparts per billion. We describe how temperature cycled operation combined with advanced data evaluation enables one sensor to act as a sensor array thereby vastly improving selectivity. Field tests require advanced packaging, which is described, and examples of possible applications like selective detection of ammonia for urea injection control in diesel exhausts and toxic volatile organic compounds for indoor air quality monitoring and control are given.

Place, publisher, year, edition, pages
Oxford: Woodhead Publishing Limited, 2020, 2. p. 309-346
Series
Woodhead Publishing Series in Electronic and Optical Materials
Keywords [en]
Gas sensors, field-effect gas sensors, semiconductor gas sensors, VOC, harsh environment
National Category
Other Chemical Engineering
Identifiers
URN: urn:nbn:se:liu:diva-161059DOI: 10.1016/B978-0-08-102559-8.00010-0Libris ID: p1nvw8k0mtqshqjzISBN: 9780081025598 (print)OAI: oai:DiVA.org:liu-161059DiVA, id: diva2:1362376
Available from: 2019-10-18 Created: 2019-10-18 Last updated: 2019-12-06Bibliographically approved

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Andersson, MikeLloyd Spetz, AnitaPuglisi, Donatella

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