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Spectroscopic investigation on the near-substrate plasma characteristics of chromium HiPIMS in low density discharge mode
Univ Chinese Acad Sci, Peoples R China.
Univ Chinese Acad Sci, Peoples R China.
Chinese Acad Sci, Peoples R China.
Univ Chinese Acad Sci, Peoples R China.
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2020 (English)In: Plasma sources science & technology (Print), ISSN 0963-0252, E-ISSN 1361-6595, Vol. 29, no 1, article id 015013Article in journal (Refereed) Published
Abstract [en]

High power impulse magnetron sputtering (HiPIMS) discharge promises high ionization fraction and energetic ions in comparison with dc magnetron sputtering discharge. But acknowledge on the characteristics of HiPIMS plasma in the near-substrate region (substrate vicinity), which is of great importance for film deposition, is still limited. Here, optical emission spectroscopy (OES) combined with the collisional-radiative modelling are developed and used to determine the electron temperature and the number density of neutral sputtered atom for the chromium HiPIMS plasma in substrate vicinity. The OES analysis demonstrated the HiPIMS discharge of Cr sputtering process in low density mode was dominated by the electron impact ionization of argon atoms and excitation of chromium atoms. As the HiPIMS plasma in the substrate vicinity is far from the local thermal equilibrium state, the relative intensities of transition lines to ArI 4p states was used to calculate the electron temperature. Subsequently, the neutral chromium atoms density about 10(17) m(-3) was reported in the near-substrate region. Our findings have important implications for species generation in low density HiPIMS discharge, with applications in synthesis of dense chromium coatings.

Place, publisher, year, edition, pages
IOP PUBLISHING LTD , 2020. Vol. 29, no 1, article id 015013
Keywords [en]
high power impulse magnetron sputtering; optical emission spectroscopy; electron excitation temperature; chromium atoms density; near-substrate region
National Category
Fusion, Plasma and Space Physics
Identifiers
URN: urn:nbn:se:liu:diva-163674DOI: 10.1088/1361-6595/ab5c03ISI: 000509888100001OAI: oai:DiVA.org:liu-163674DiVA, id: diva2:1393941
Note

Funding Agencies|National Natural Science Foundation of ChinaNational Natural Science Foundation of China [11705258]; National Science and Technology Major Project [2017-VII-0012-0108]; Ningbo Science and Technology Innovation Project [2018B10014]

Available from: 2020-02-17 Created: 2020-02-17 Last updated: 2020-02-17

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CiteExportLink to record
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