Progress of Ultra-Wide Bandgap Ga < sub > 2 </sub > O < sub > 3 </sub > Semiconductor Materials in Power MOSFETsShow others and affiliations
2020 (English)In: IEEE transactions on power electronics, ISSN 0885-8993, E-ISSN 1941-0107, Vol. 35, no 5, p. 5157-5179Article in journal (Refereed) Published
Abstract [en]
As a promising ultra-wide bandgap semiconductor, the <italic>& x03B2;</italic>-phase of Ga<sub>2</sub>O<sub>3</sub> has attracted more and more interest in the field of power electronics due to its ultra-wide bandgap (4.8 & x00A0;eV), high theoretical breakdown electric field (8 MV & x002F;cm), and large Baliga & x0027;s figure of merit, which is deemed as a potential candidate for next generation high-power electronics, including diodes, field effect transistors (FETs), etc. In this article, we introduce the basic material properties of Ga<sub>2</sub>O<sub>3</sub>, and review the recent progress and advances of <italic>& x03B2;</italic>-Ga<sub>2</sub>O<sub>3</sub> based metal & x2013;oxide & x2013;semiconductor field-effect transistors (<sc>mosfet</sc>s). Due to the problematic p-type doping technology up to now, the enhancement-mode (E-mode) <italic>& x03B2;</italic>-Ga<sub>2</sub>O<sub>3</sub> FETs face more difficulties, compared with depletion mode (D-mode). This article focuses on reviewing the recent progress of E-mode Ga<sub>2</sub>O<sub>3</sub> <sc>mosfet</sc>s, summarizing and comparing various feasible solutions when p-type doping is absent. Furthermore, the device fabrication and performances of state-of-art <italic>& x03B2;</italic>-Ga<sub>2</sub>O<sub>3</sub> <sc>mosfet</sc>s, including D-mode, E-mode, and planar & x002F;vertical structure are fully discussed and compared, as well as potential solutions to the challenges of Ga<sub>2</sub>O<sub>3</sub> FETs.
Place, publisher, year, edition, pages
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC , 2020. Vol. 35, no 5, p. 5157-5179
Keywords [en]
Crystals; Silicon carbide; Gallium nitride; Thermal conductivity; Photonic band gap; Epitaxial growth; Conductivity; Gallium oxide (Ga2O3); power metal-oxide-semiconductor field-effect transistor (mosfet); power semiconductor devices; ultra wide band-gap (UWBG) semiconductor
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:liu:diva-165934DOI: 10.1109/TPEL.2019.2946367ISI: 000530033300038OAI: oai:DiVA.org:liu-165934DiVA, id: diva2:1435152
Note
Funding Agencies|National Natural Science Foundation of ChinaNational Natural Science Foundation of China [61874084, 51711530035, 61704125]; Fundamental Research Funds for the Central UniversitiesFundamental Research Funds for the Central Universities [XJS191102]; Swedish Foundation for International Cooperation in Research and Higher Education [CH2016-6722]
2020-06-042020-06-042021-12-29