Mueller matrix ellipsometer using dual continuously rotating anisotropic mirrorsShow others and affiliations
2020 (English)In: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 45, no 13, p. 3541-3544Article in journal (Refereed) Published
Abstract [en]
We demonstrate calibration and operation of a single wavelength (660 nm) Mueller matrix ellipsometer in normal transmission configuration using dual continuously rotating anisotropic mirrors. The mirrors contain highly spatially coherent nanostructure slanted columnar titanium thin films deposited onto optically thick gold layers on glass substrates. Upon rotation around the mirror normal axis, sufficient modulation of the Stokes parameters of light reflected at oblique angle of incidence is achieved. Thereby, the mirrors can be used as a polarization state generator and polarization state analyzer in a generalized ellipsometry instrument. A Fourier expansion approach is found sufficient to render and calibrate the effects of the mirror rotations onto the polarized light train within the ellipsometer. The Mueller matrix elements of a set of anisotropic samples consisting of a linear polarizer and a linear retarder are measured and compared with model data, and very good agreement is observed. (C) 2020 Optical Society of America
Place, publisher, year, edition, pages
OPTICAL SOC AMER , 2020. Vol. 45, no 13, p. 3541-3544
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Identifiers
URN: urn:nbn:se:liu:diva-168257DOI: 10.1364/OL.398060ISI: 000546808900051PubMedID: 32630893OAI: oai:DiVA.org:liu-168257DiVA, id: diva2:1460193
Note
Funding Agencies|Materials Research Science and Engineering Center, Nebraska [DMR 1420645]; Knut och Alice Wallenbergs StiftelseKnut & Alice Wallenberg Foundation; Deutsche ForschungsgemeinschaftGerman Research Foundation (DFG) [FE 1532/101]; Air Force Office of Scientific ResearchUnited States Department of DefenseAir Force Office of Scientific Research (AFOSR) [FA9550-18-1-0360]; National Science FoundationNational Science Foundation (NSF) [DMR1808715]
2020-08-222020-08-222020-08-22