Near-Interface Trap Model for the Low Temperature Conductance Signal in SiC MOS Capacitors With Nitrided Gate OxidesShow others and affiliations
2020 (English)In: IEEE Transactions on Electron Devices, ISSN 0018-9383, E-ISSN 1557-9646, Vol. 67, no 9, p. 3722-3728Article in journal (Refereed) Published
Abstract [en]
The low channel-carrier mobility in commercial SiC MOSFETs has been attributed to fast electron traps labeled "NI." These traps exhibit anomalous behavior compared to other interface trap signals. Furthermore, the electrical parameters extracted from a conventional interface trap analysis of the NI signal are not physically reasonable. To explore the origin of these traps, we fabricated SiC MOS capacitors and measured the conductance across a range of temperatures (between 50 and 300 K). By analyzing the surface electron density at the signal peaks, it is evident that these traps are in fact near-interface traps (NITs)-they are located within the oxide and exchange electrons via a tunneling mechanism. We also developed a model for the conductance generated by NITs and demonstrated a good fit to the experimental data. The knowledge that the NI signal is due to NITs will help in directing future efforts to improve SiC MOSFET performance.
Place, publisher, year, edition, pages
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC , 2020. Vol. 67, no 9, p. 3722-3728
Keywords [en]
Electron traps; Logic gates; Silicon carbide; Temperature measurement; Temperature distribution; Annealing; MOS capacitors; MOS capacitors; MOS devices; near-interface traps (NITs); silicon carbide; tunneling
National Category
Condensed Matter Physics
Identifiers
URN: urn:nbn:se:liu:diva-169212DOI: 10.1109/TED.2020.3011661ISI: 000562091800034OAI: oai:DiVA.org:liu-169212DiVA, id: diva2:1466653
Note
Funding Agencies|SICC Materials Company, Ltd., China, as the industry partner in the Australian Research Council Linkage Project [ARC LP 50100525]; Icelandic Centre for Research (Rannis); University of Iceland Research Fund
2020-09-122020-09-122020-09-12