Low resistivity amorphous carbon-based thin films employed as anti-reflective coatings on copperShow others and affiliations
2020 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 712, article id 138319Article in journal (Refereed) Published
Abstract [en]
Amorphous carbon-based coatings deposited on copper substrates by magnetron sputtering at different target-to-substrate distances were investigated. Films deposited at short distances as 2 cm presented the best results in terms of morphology, density, and resistivity. Ultraviolet near-infrared range spectrometry measurements determined total reflectance and ellipsometry, extinction coefficient, refraction index, and pseudo bandgap. Amorphous carbon films of 150 nm deposited at 2 cm reduced the total reflectance by up to 60 ± 5% in the near-infra-red range when compared to pure copper films. The addition of Fe* boosts the absorption of the coating reducing the total reflectance by up to 70 ± 5% in near-infrared. (Fe*: deposited from stainless-steel target used in direct-current magnetron sputtering). Also, Fe* reduces the electrical resistivity by a factor of 100 compared to that of pure amorphous carbon films. The reduction in total reflectance induced by the presence of the amorphous carbon-based films on copper depends, as expected, on light penetration depth and the absorption coefficient.
Place, publisher, year, edition, pages
2020. Vol. 712, article id 138319
Keywords [en]
Amorphous carbon, Stainless steel, Thin films, Anti-reflective, Resistivity, Direct-current magnetron sputtering.
National Category
Chemical Sciences
Identifiers
URN: urn:nbn:se:liu:diva-170524DOI: 10.1016/j.tsf.2020.138319ISI: 000579496200001OAI: oai:DiVA.org:liu-170524DiVA, id: diva2:1476449
Note
Funding agencies:This project was supported by the Centre National de la RechercheScientifique CNRS Univeristé Paris Saclay and LPGP.
2020-10-142020-10-142020-11-16