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In situ nanoindentation measurements of arc-evaporated Cr0.49Al0.51N, Al0.66Ti0.34N, and Al0.65Ti0.33Y0.02N films up to 800 degrees C
Guangdong Univ Technol, Peoples R China.
Linköping University, Department of Physics, Chemistry and Biology. Linköping University, Faculty of Science & Engineering. Guangdong Univ Technol, Peoples R China.
Pusan Natl Univ, South Korea.
2020 (English)In: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, ISSN 2166-2746, E-ISSN 2166-2754, Vol. 38, no 2, article id 020601Article in journal (Refereed) Published
Abstract [en]

In this study, the in situ hardness and elastic modulus measurements of arc-evaporated Cr0.49Al0.51N, Al0.66Ti0.34N, and Al0.65Ti0.33Y0.02N films are investigated using a high-temperature nanoindentation tester. It is found that the hardness of Cr0.49Al0.51N initially increases from 30.2 +/- 2.3GPa at room temperature (RT) and reaches a maximum of 33.2 +/- 2.4GPa at 600 degrees C before decreasing to 27.9 +/- 2.1GPa at 800 degrees C. However, the results for elastic modulus versus temperature follow a degraded trend, with 405 +/- 23GPa for RT, decreasing to 280 +/- 18GPa at 800 degrees C. Increases in the hardness and the elastic modulus can be achieved for both Al0.66Ti0.34N and Al0.65Ti0.33Y0.02N films as their temperatures increase. The addition of Y effectively promotes the hardness and the elastic modulus of Al0.66Ti0.34N at RT-300 degrees C. However, both hardness and elastic modulus change slightly as Y is incorporated at 300-800 degrees C.

Place, publisher, year, edition, pages
A V S AMER INST PHYSICS , 2020. Vol. 38, no 2, article id 020601
National Category
Polymer Technologies
Identifiers
URN: urn:nbn:se:liu:diva-170703DOI: 10.1116/1.5138723ISI: 000569100800020OAI: oai:DiVA.org:liu-170703DiVA, id: diva2:1477669
Note

Funding Agencies|National Natural Science Foundation of China (NNSFC)National Natural Science Foundation of China (NSFC) [51901048, 51875109]; Natural Science Foundation of Guangdong ProvinceNational Natural Science Foundation of Guangdong Province [2018A030310546, 2019A1515012234]; Global Frontier Program through the Global Frontier Hybrid Interface Materials of the National Research Foundation of Korea [2013M3A6B1078873]

Available from: 2020-10-19 Created: 2020-10-19 Last updated: 2020-10-19

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Wang, Qimin
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