Impact of Si addition on oxidation resistance of Zr-Si-N nanocomposite filmsShow others and affiliations
2021 (English)In: Vacuum, ISSN 0042-207X, E-ISSN 1879-2715, Vol. 183, article id 109853Article in journal (Refereed) Published
Abstract [en]
Incorporating Si element into nitride films is known to enhance mechanical properties and oxidation resistance. Here, we reported the nanocomposite films of Zr-Si-N deposited using a hybrid deposited system combining rf magnetron sputtering from a Si3N4 target with dc magnetron sputtering from Zr target. Microstructure and oxidation resistance of Zr-Si-N nanocomposite films with 0-20.9 at.% Si content were investigated. The results indicated that the binary Zr-N film exhibits a typical columnar structure and the Zr-Si-N films become denser as the elevated Si content. The cross-section of film transforms to a dense and glassy structure when increasing the Si concentrations. The oxide scales of the Zr-Si-N films consist of ZrO2 nanograins and amorphous SiNx tissue. The introduction of the Si element significantly improves the oxidation resistance of the Zr-Si-N films due to the amorphous SiNx tissue phase suppresses both the inward diffusion of the oxygen and cracking in oxide scale caused by the phase transition from t-ZrO2 to m-ZrO2.
Place, publisher, year, edition, pages
PERGAMON-ELSEVIER SCIENCE LTD , 2021. Vol. 183, article id 109853
Keywords [en]
Zr-Si-N; Nanocomposite; Microstructure; Oxidation resistance
National Category
Inorganic Chemistry
Identifiers
URN: urn:nbn:se:liu:diva-172601DOI: 10.1016/j.vacuum.2020.109853ISI: 000600900600003OAI: oai:DiVA.org:liu-172601DiVA, id: diva2:1521660
Note
Funding Agencies|National Natural Science Foundation of ChinaNational Natural Science Foundation of China (NSFC) [51901048, 51875109]; National Key Research and Development Project of China [2017YFE0125400]; Natural Science Foundation of Guangdong ProvinceNational Natural Science Foundation of Guangdong Province [2018A030310546, 2019A1515012234]; Featured Innovation Project of Guangdong Province Office of Education [2018KTSCX180]; Global Frontier Program through the Global Frontier Hybrid Interface Materials of the National Research Foundation of Korea [2013M3A6B1078873]
2021-01-242021-01-242021-01-24