Pulsed laser deposited transparent and conductive V-doped ZnO thin filmsShow others and affiliations
2020 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 700Article in journal (Refereed) Published
Abstract [en]
ZnO and vanadium-doped ZnO (0.7â4.1 at.%) thin films were deposited onto corning glass substrates by the pulsed laser deposition technique using a KrF excimer laser (λ = 248 nm). The films were deposited at 500 °C under an oxygen pressure of 1 Pa with a laser fluence of 2 J/cm2. The structural, morphological, optical and electrical properties as a function of the dopant atomic concentration were investigated by means of X-ray diffraction, Scanning Electron Microscopy, spectrophotometry, conductivity and Hall measurements. All the doped and undoped films show a preferential orientation along the c-axis with a deterioration at higher doping levels (>4 at. %). Besides, as the doping amount increases the in-plane stress leads to an increase of the c-axis lattice parameter. The films are transparent within the wavelength range 400â1200 nm. The electrical resistivity of the films drops from 8.2 10â3 to 1.3 10â3 Ω cm with an increase in the dopant concentration up to 0.9 at. % and then rises as the dopant level is increased further.
Place, publisher, year, edition, pages
Elsevier, 2020. Vol. 700
Keywords [en]
Vanadium-doped zinc oxide, Thin films, Pulsed laser deposition, Transparent conducting oxides, Electrical properties, Optical properties
National Category
Condensed Matter Physics
Identifiers
URN: urn:nbn:se:liu:diva-174459DOI: 10.1016/j.tsf.2020.137892ISI: 000520173700004Scopus ID: 2-s2.0-85081133986OAI: oai:DiVA.org:liu-174459DiVA, id: diva2:1538707
2021-03-212021-03-212021-12-29Bibliographically approved