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On the electron energy distribution function in the high power impulse magnetron sputtering discharge
Leibniz Inst Surface Engn IOM, Germany.
Univ Paris Saclay, France.
Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics. Linköping University, Faculty of Science & Engineering. Univ Paris Saclay, France.ORCID iD: 0000-0001-8591-1003
Univ Iceland, Iceland; Univ Twente, Netherlands.
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2021 (English)In: Plasma sources science & technology, ISSN 0963-0252, E-ISSN 1361-6595, Vol. 30, no 4, article id 045011Article in journal (Refereed) Published
Abstract [en]

We apply the ionization region model (IRM) and the Orsay Boltzmann equation for electrons coupled with ionization and excited states kinetics (OBELIX) model to study the electron kinetics of a high power impulse magnetron sputtering (HiPIMS) discharge. In the IRM the bulk (cold) electrons are assumed to exhibit a Maxwellian energy distribution and the secondary (hot) electrons, emitted from the target surface upon ion bombardment, are treated as a high energy tail, while in the OBELIX the electron energy distribution is calculated self-consistently using an isotropic Boltzmann equation. The two models are merged in the sense that the output from the IRM is used as an input for OBELIX. The temporal evolutions of the particle densities are found to agree very well between the two models. Furthermore, a very good agreement is demonstrated between the bi-Maxwellian electron energy distribution assumed by the IRM and the electron energy distribution calculated by the OBELIX model. It can therefore be concluded that assuming a bi-Maxwellian electron energy distribution, constituting a cold bulk electron group and a hot secondary electron group, is a good approximation for modeling the HiPIMS discharge.

Place, publisher, year, edition, pages
IOP PUBLISHING LTD , 2021. Vol. 30, no 4, article id 045011
Keywords [en]
high power impulse magnetron sputtering; electron energy distribution function; collisional-radiative model
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URN: urn:nbn:se:liu:diva-175796DOI: 10.1088/1361-6595/abefa8ISI: 000642505300001OAI: oai:DiVA.org:liu-175796DiVA, id: diva2:1556798
Note

Funding Agencies|Free State of Saxony; European Regional Development FundEuropean Commission [100336119]; Icelandic Research Fund [130029, 196141]; Swedish Research CouncilSwedish Research CouncilEuropean Commission [VR 201804139]; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University (Faculty Grant SFO-Mat-LiU) [2009-00971]

Available from: 2021-05-24 Created: 2021-05-24 Last updated: 2022-09-15

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