In this work a new plasma-based approach to hydrogen intercalation of Graphene grown on SiC is demonstrated. By optimization of the inductively coupled plasma parameters the intercalated by hydrogen Graphene has been modified gradually and transformed into the two-dimensional hydrocarbon Graphane. The intermediate stages during the transition of Graphene to Graphane were studied by means of Raman spectroscopy and AFM. The dependence of the intensities of the Raman Graphene fingerprints: D and G peaks on the hydrogen intercalation time has been studied. The changes of resistance during the hydrogen plasma treatment were parsed. The Raman (D + D ) peak corresponding to hydrogenated graphene was studied in detail. The method developed is highly reliable and flexible as well as convenient for large-scale fabrication of Graphane to be employed as a hydrogen storage material and in 2D electronics.