Incorporation of nitrogen in Cr/Sc multilayers giving improved soft x-ray reectivity
2008 (English)In: Applied Physics Letters, ISSN 0003-6951, Vol. 92, no 9, 091913- p.Article in journal (Refereed) Published
Soft x-ray reflectivity (SXR) of Cr/Sc multilayer with bilayer thickness of =1.56 nm was increased by 100% by an intentional introduction of nitrogen during magnetron sputtering. Multilayers deposited at background pressures of 2×10−6 Torr exhibited amorphous layers with flat interfaces. At 2×10−5 Torr, understoichiometric CrNx/ScNy multilayer with a nitrogen content of ~34 at. % was formed. CrNx/ScNy multilayer comprising of only 100 periods exhibited a SXR of 11.5%. X-ray and electron microscopy analyses showed that the improvement in performance is a result of reduced interfacial diffusion yielding interface widths of 0.29 nm. The CrNx/ScNy multilayer exhibited thermal stability up to >380 °C.
Place, publisher, year, edition, pages
2008. Vol. 92, no 9, 091913- p.
chemical interdiffusion, chromium, doping, electron microscopy, multilayers, nitrogen, scandium, sputter deposition, thermal stability, X-ray microscopy, X-ray reflection
IdentifiersURN: urn:nbn:se:liu:diva-13062DOI: 10.1063/1.2857459OAI: oai:DiVA.org:liu-13062DiVA: diva2:17758