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Temporal, spatial and spectroscopic study of plasma emission on Cu target in bipolar HiPIMS
Masaryk Univ, Czech Republic.
Masaryk Univ, Czech Republic.
Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics. Linköping University, Faculty of Science & Engineering.ORCID iD: 0000-0001-8591-1003
Masaryk Univ, Czech Republic.
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2023 (English)In: Plasma sources science & technology, ISSN 0963-0252, E-ISSN 1361-6595, Vol. 32, no 7, article id 075019Article in journal (Refereed) Published
Abstract [en]

Bipolar high power impulse magnetron sputtering introduces new possibilities to affect positive ions created during the negative discharge pulse in order to tailor thin films with specific parameters. This paper studies plasma emission in different experimental conditions during different phases of the positive pulse with spectral, spatial and temporal resolution. It is found that predominantly the working gas gives rise to plasma emission during the positive pulse. The plasma emission is observed only in regions of low magnetic confinement, forming a mushroom-like shape in the middle of the target or a dome-like shape on the outer parts of the target. An explanation of the discharge kinetics is proposed based on the acquired data.

Place, publisher, year, edition, pages
IOP Publishing Ltd , 2023. Vol. 32, no 7, article id 075019
Keywords [en]
bipolar HiPIMS; fast camera screening; plasma diagnostics; emission spectroscopy; HiPIMS
National Category
Fusion, Plasma and Space Physics
Identifiers
URN: urn:nbn:se:liu:diva-197587DOI: 10.1088/1361-6595/ace8b8ISI: 001041303300001OAI: oai:DiVA.org:liu-197587DiVA, id: diva2:1796028
Note

Funding Agencies|Ministry of Education, Youth and Sports of the Czech Republic [LM2023039]; Swedish Research Council [VR 2018-04139]; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoeping University [2009-00971]

Available from: 2023-09-11 Created: 2023-09-11 Last updated: 2023-09-11

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Output format
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