Evolution of the electron energy distribution and plasma parameters in a pulsed magnetron discharge
2001 (English)In: Applied Physics Letters, ISSN 0003-6951 (print), 1077-3118 (online), Vol. 78, no 22, 3427- p.Article in journal (Refereed) Published
We demonstrate the creation of high-density plasma in a pulsed magnetron discharge. A 2.4 MW pulse, 100 µs wide, with a repetition frequency of 50 Hz is applied to a planar magnetron discharge to study the temporal behavior of the plasma parameters: the electron energy distribution function, the electron density, and the average electron energy. The electron density in the vicinity of the substrate, 20 cm below the cathode target, peaks at 8×1017 m–3, 127 µs after initiating the pulse. Towards the end of the pulse two energy groups of electrons are present with a corresponding peak in average electron energy. With the disapperance of the high-energy electron group, the electron density peaks, and the electron energy distribution appears to be Maxwellian like. Following the electron density peak, the plasma becomes more Druyvesteyn like with a higher average electron energy.
Place, publisher, year, edition, pages
2001. Vol. 78, no 22, 3427- p.
IdentifiersURN: urn:nbn:se:liu:diva-13372DOI: 10.1063/1.1376150OAI: oai:DiVA.org:liu-13372DiVA: diva2:20530