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Nanoparticles for long-term stable, more selective MISiCFET gas sensors
Linköping University, Department of Physics, Chemistry and Biology, Applied Physics . Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Applied Physics . Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Applied Physics . Linköping University, The Institute of Technology.
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2005 (English)In: Sensors and Actuators B, ISSN 0925-4005, Vol. 107, no 2, 831-838 p.Article in journal (Refereed) Published
Abstract [en]

Synthesis of metal-oxide nanoparticles and utilization of these particles as gate materials for field-effect sensor devices is reported. Improved selectivity to specific gases is expected by modulating the size of the oxide nanoparticles or impregnating them with catalytic metals. Another objective is to improve the long-term thermal stability of the sensors, since the metal loaded nanoparticles may prevent thermally induced restructuring of the gate layer, which is often a problematic issue for the catalytic metal layers. Because of its reasonably high electrical conductivity, which is especially important for the capacitive gas sensors, ruthenium dioxide has been identified to be one of the potential candidates as gate material for the field-effect sensor devices. Interestingly, this material has been found to change its resistivity in different gaseous ambients. When used as a gate material, sensitivity to reducing gases has been observed for the RuO2/SiO2/4H-SiC capacitors. Changes in the resistivity of the films due to various gas exposures have also been recorded. Morphological studies of nanoparticles (SiO2 and Al2O3), loaded or impregnated with catalytic metals (e.g. Pt), have been performed.

Place, publisher, year, edition, pages
2005. Vol. 107, no 2, 831-838 p.
Keyword [en]
Sensors; Catalytic material; MISiCFET; Ruthenium dioxide
National Category
Engineering and Technology
URN: urn:nbn:se:liu:diva-13385DOI: 10.1016/j.snb.2004.12.024OAI: diva2:20565
Available from: 2005-10-06 Created: 2005-10-06 Last updated: 2015-03-09
In thesis
1. New Materials for Gas Sensitive Field-Effect Device Studies
Open this publication in new window or tab >>New Materials for Gas Sensitive Field-Effect Device Studies
2005 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

Gas sensor control is potentially one of the most important techniques of tomorrow for the environment. All over the world cars are preferred for transportation, and accordingly the number of cars increases, unfortunately, together with pollutants. Boilers and powerplants are other sources of pollutants to the environment. Metal-Insulator-Silicon Carbide (MISiC) Field-effect sensors in car applications and boilers have the potential to reduce the amount of pollutants. These devices are sensitive to several gases in exhaust and flues gases, such as hydrogen, hydrocarbons, and ammonia (for the selective catalytic reduction (SCR) application). These applications require specific and long term stable sensors. The car industry for instance wants sensors that will stand at least 240 000 km.

This thesis presents studies of the active layers in MIS Fieldeffect gas sensors. Fundamental studies of the sensor mechanism has been performed in ultra high vacuum, UHV, to understand the gas response mechanism in more detail, and to find out how the sensing mechanism is affected by the catalytic active gate material. The influence of four different insulating layers was studied at atmospheric pressure. The catalytic layer has also been altered to metal oxide nanoparticles with or without impregnation of catalytic metals.

Nanoparticles are potential candidates to be used as the gate material for high temperature, long-term stable FET sensor devices. The combination of catalytic metals and metal oxides may prevent reconstruction of the metal. The use of nanoparticles will increase the number of triple points (catalytic material and insulator in contact with gas), which are crucial e.g. for the ammonia sensitivity. Another challenging aspect of nanoparticles is the possibility to get selectivity to different gases based on the particle size.

The goal is to find new sensitive, selective and more long term stable materials, which meet the requirements above.

From the UHV studies we learned that the two catalytic active metals Pt and Pd, do behave in a similar way, although there are some quantitative differences. Values for the heat of adsorption on both the Pd and Pt surfaces are estimated as well as the dipole moments for the adsorbates on the insulator surface.

The insulators play an important role in the sensing mechanism, since the adsorption of hydrogen atoms (or protons) that are detected by the sensor occur on the insulator surface. By changing the insulator material the saturation response of the sensors is affected. It was shown that Al2O3 gave a higher saturated response to hydrogen in Pt-MIS capacitors at 140°C as compared to Ta2O5, SiO2, and Si3N4.

We have tested wet synthesized ruthenium dioxide and ruthenium nanoparticles, which are electrically conducting and catalytically active sensing material. RuO2 is especially interesting as a high temperature material since it is already oxidized. Both materials show a sensitivity pattern comparable to porous platinum. The temperature dependence of the gas response indicates a higher catalytic activity of the RuO2 as compared to Ru nanoparticles.

Nanoparticles synthesized by aerosol technology provide several advantages like a good adhesion of the particles to the substrate, many possible material combinations and efficient methods for particle separation according to size. The methods to use this technology for sensing materials in MISiC sensors are now under development and some preliminary results are obtained.

Place, publisher, year, edition, pages
Linköping: Linköping University Electronic Press, 2005. 64 p.
Linköping Studies in Science and Technology. Dissertations, ISSN 0345-7524 ; 957
ruthenium dioxide, nanoparticles, MISiCFET, sensors
National Category
Physical Sciences
urn:nbn:se:liu:diva-4243 (URN)91-8529-974-X (ISBN)
Public defence
2005-10-07, Hörsal Planck, Fysikhuset, Campus Valla, Linköpings universitet, Linköping, 10:15 (English)
On the day of the public defence of the doctoral thesis, the status of articles I and II was: accepted for publication.Available from: 2005-10-06 Created: 2005-10-06 Last updated: 2015-03-24Bibliographically approved

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