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Simulation of cubic GaN growth in SA MOVPE
Linköping University, Department of Physics, Chemistry and Biology.
2009 (English)Independent thesis Advanced level (degree of Master (Two Years)), 20 credits / 30 HE creditsStudent thesis
Abstract [en]

In this work growth of cubic GaN in the selective area (SA) MOVPE process is

simulated. The simulations are restricted to small pattern SA MOVPE growth.

In this case the traditional MOVPE growth and the enhanced growth caused by

surface diffusion are important growth factors. The lateral vapor phase diffusion

is ignored while this process only has a small impact on the enhanced growth in

the small pattern SA growth. The model is build for simulation of anisotropic

growth. It has been shown that different type of anisotropic growth occurs when

the mask pattern are orientated in different directions on the substrate. While

the anisotropic growth is not well understood two different models are studied in

this work.

The simulation is restricted to the geometrical growth characteristics such

as mask and crystal width, mask alignment and surface diffusion on the crystal.

The reactor geometry, pressure and growth temperature are not investigated that

closely and are only treated as constants in the model.

The model used in this simulation gives good results for short time simulations

for some certain cases. The model shows that the fill factor has a greater

impact on the grown shapes than the individual mask and crystal width. But

there are problems with the anisotropic and flux from mask modeling while some

facets do not appear and the lateral growth along the mask show doubtful results.

The model show good results in short time growth and predict some important

characteristics in SA MOVPE.

Place, publisher, year, edition, pages
2009. , 62 p.
Keyword [en]
simulation, gallium nitride, SAG MOVPE, anisotropic
National Category
Physical Sciences
URN: urn:nbn:se:liu:diva-17682ISRN: LiTH-IFM-A-EX--09/2079--SEOAI: diva2:211295
Mott, Linköpings Universitet SE-581 83, Linköping (English)
Available from: 2009-04-17 Created: 2009-04-14 Last updated: 2009-04-17Bibliographically approved

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