Computer screen photo-assisted off-null ellipsometry
2006 (English)In: Applied Optics, ISSN 0003-6935, Vol. 45, no 30, 7795-7799 p.Article in journal (Refereed) Published
The ellipsometric measurement of thickness is demonstrated using a computer screen as a light source and a webcam as a detector, adding imaging off-null ellipsometry to the range of available computer screen photoassisted techniques. The results show good qualitative agreement with a simplified theoretical model and a thickness resolution in the nanometer range is achieved. The presented model can be used to optimize the setup for sensitivity. Since the computer screen serves as a homogeneous large area illumination source, which can be tuned to different intensities for different parts of the sample, a large sensitivity range can be obtained without sacrificing thickness resolution.
Place, publisher, year, edition, pages
2006. Vol. 45, no 30, 7795-7799 p.
National CategoryEngineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-13836DOI: 10.1364/AO.45.007795OAI: oai:DiVA.org:liu-13836DiVA: diva2:21797