Ionic conductivity and thermal stability of magnetron-sputtered nanocrystalline yttria-stabilized zirconia
2009 (English)In: Journal of Applied Physics, ISSN 0021-8979, Vol. 105, no 10, 104907- p.Article in journal (Refereed) Published
Thermally stable, stoichiometric, cubic yttria-stabilized zirconia (YSZ) thin-film electrolytes have been synthesized by reactive pulsed dc magnetron sputtering from a Zr-Y (80/20 at. %) alloy target. Films deposited at floating potential had a ‹111› texture. Single-line profile analysis of the 111 x-ray diffraction peak yielded a grain size of ~20 nm and a microstrain of ~2% regardless of deposition temperature. Films deposited at 400 °C and selected bias voltages in the range from -70 to -200 V showed a reduced grain size for higher bias voltages, yielding a grain size of ~6 nm and a microstrain of ~2.5% at bias voltages of -175 and -200 V with additional incorporation of argon. The films were thermally stable; very limited grain coarsening was observed up to an annealing temperature of 800 °C. Temperature-dependent impedance spectroscopy analysis of the YSZ films with Ag electrodes showed that the in-plane ionic conductivity was within one order of magnitude higher in films deposited with substrate bias corresponding to a decrease in grain size compared to films deposited at floating potential. This suggests that there is a significant contribution to the ionic conductivity from grain boundaries. The activation energy for oxygen ion migration was determined to be between 1.14 and 1.30 eV.
Place, publisher, year, edition, pages
2009. Vol. 105, no 10, 104907- p.
National CategoryNatural Sciences
IdentifiersURN: urn:nbn:se:liu:diva-18418DOI: 10.1063/1.3130404OAI: oai:DiVA.org:liu-18418DiVA: diva2:219420
M. Sillassen, Per Eklund, M. Sridharan, N. Pryds, N. Bonanos and J. Bottiger, Ionic conductivity and thermal stability of magnetron-sputtered nanocrystalline yttria-stabilized zirconia, 2009, Journal of Applied Physics, (105), 10, 104907.
Copyright: American Institute of Physics