Spatial electron density distribution in a high-power pulsed magnetron discharge
2005 (English)In: IEEE Transactions on Plasma Science, ISSN 0093-3813, Vol. 33, no 2, 346-347 p.Article in journal (Refereed) Published
The spatial electron density distribution was measured as function of time in a high-power pulsed magnetron discharge. A Langmuir probe was positioned in various positions below the target and the electron density was mapped out. We recorded peak electron densities exceeding 1019 m-3 in a close vicinity of the target. The dynamics of the discharge showed a dense plasma expanding from the "race-track" axially into the vacuum chamber. We also record electrons trapped in a magnetic bottle where the magnetron magnetic field is zero, formed due to the unbalanced magnetron.
Place, publisher, year, edition, pages
2005. Vol. 33, no 2, 346-347 p.
magnetron sputtering, plasma density, pulsed plasmas, thin film deposition
IdentifiersURN: urn:nbn:se:liu:diva-13976DOI: 10.1109/TPS.2005.845022OAI: oai:DiVA.org:liu-13976DiVA: diva2:22366