Cubic Sc1-xAlxN solid solution thin films deposited by reactive magnetron sputter epitaxy onto ScN(111)
2009 (English)In: JOURNAL OF APPLIED PHYSICS, ISSN 0021-8979, Vol. 105, no 11, 132862- p.Article in journal (Refereed) Published
Reactive magnetron sputter epitaxy was used to deposit thin solid films of Sc1-xAlxN (0 andlt;= x andlt;= 1) onto MgO(111) substrates with ScN(111) seed layers. Stoichiometric films were deposited from elemental Sc and Al targets at substrate temperatures of 600 S C. The films were analyzed by Rutherford backscattering spectroscopy, elastic recoil detection analysis, x-ray diffraction, and transmission electron microscopy. Results show that rocksalt structure (c)-Sc1-xAlxN solid solutions with AlN molar fractions up to similar to 60% can be synthesized. For higher AlN contents, the system phase separates into c- and wurtzite structure (w)-Sc1-xAlxN domains. The w-domains are present in three different orientations relative to the seed layer, namely, Sc1-xAlxN(0001)parallel to ScN(111) with Sc1-xAlxN[(1) over bar2 (1) over bar0]parallel to ScN[1 (1) over bar0], Sc1-xAlxN(10 (1) over bar1)parallel to ScN(111) with Sc1-xAlxN[(1) over bar2 (1) over bar0]parallel to ScN[1 (1) over bar0], and Sc1-xAlxN(10 (1) over bar1)parallel to ScN(113). The results are compared to first-principles density functional theory calculations for the mixing enthalpies of c-, w-, and zinc blende Sc0.50Al0.50N solid solutions, yielding metastability with respect to phase separation for all temperatures below the melting points of AlN and ScN.
Place, publisher, year, edition, pages
2009. Vol. 105, no 11, 132862- p.
IdentifiersURN: urn:nbn:se:liu:diva-19664DOI: 10.1063/1.3132862OAI: oai:DiVA.org:liu-19664DiVA: diva2:227284
Carina Höglund, Javier Bareno, Jens Birch, Björn Alling, Zsolt Czigany and Lars Hultman, Cubic Sc1-xAlxN solid solution thin films deposited by reactive magnetron sputter epitaxy onto ScN(111), 2009, JOURNAL OF APPLIED PHYSICS, (105), 11, 132862.
Copyright: American Institute of Physics