Monolithic SU-8 microcavities for efficient fluorescence collection
2009 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 19, no 8, 085011- p.Article in journal (Refereed) Published
The fabrication of capped microstructures such as channels or cavities typically involves multiple production steps. In this work, we demonstrate a fabrication procedure that enables the generation of capped monolithic microstructures of arbitrary geometry in one single SU-8 exposure step. The presented method also enables the embedment of metal self-aligned surfaces for use as electrodes or mirrors. The devices furthermore demonstrate a capability of increasing fluorescent collection, as measured by an epi-fluorescent inverted microscope, by up to 15-fold.
Place, publisher, year, edition, pages
IOP Publishing , 2009. Vol. 19, no 8, 085011- p.
IdentifiersURN: urn:nbn:se:liu:diva-19796DOI: 10.1088/0960-1317/19/8/085011OAI: oai:DiVA.org:liu-19796DiVA: diva2:229000