liu.seSearch for publications in DiVA
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Synthesis of carbon nitride thin films by low-energy ion beam assisted evaporation: On the mechanisms for fullerene-like microstructure formation
Institute of Ion Beam Physics and Materials Research, Forschungszentrum Rossendorf, Dresden.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
Institute of Ion Beam Physics and Materials Research, Forschungszentrum Rossendorf, Dresden.
Institute of Ion Beam Physics and Materials Research, Forschungszentrum Rossendorf, Dresden.
Show others and affiliations
2005 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 483, no 1-2, 89-94 p.Article in journal (Refereed) Published
Abstract [en]

Carbon nitride (CNx) thin films were grown at different substrate temperatures by low-energy (<100 eV) ion beam assistance deposition (LE-IBAD) in order to discern possible formation mechanisms of a fullerene-like (FL) microstructure. The samples are compared to those of well-structured FL-CNx films synthesized by reactive magnetron sputtering (MS). The comparison yields similar trends for both techniques, such as limitation of the nitrogen content at 20–25 at.%, dominance of sp2 hybrids, as well as thermally activated chemical desorption of CxNy species from the substrate during growth. However, CNx films produced by LE-IBAD are amorphous. The lack of FL structural features correlates with a lower degree of sp2 clustering, attributed to the promotion of nitrile groups. Therefore, low-energy ion bombardment is shown not to be a sufficient condition for the growth of FL-CNx. This result reinforces the eventual relevance of pre-formed CxNy species at the sputtering target in MS for the introduction and/or evolution of FL arrangements.

Place, publisher, year, edition, pages
2005. Vol. 483, no 1-2, 89-94 p.
National Category
Natural Sciences
Identifiers
URN: urn:nbn:se:liu:diva-28813DOI: 10.1016/j.tsf.2004.12.027Local ID: 14001OAI: oai:DiVA.org:liu-28813DiVA: diva2:249625
Available from: 2009-10-09 Created: 2009-10-09 Last updated: 2017-12-13

Open Access in DiVA

No full text

Other links

Publisher's full text

Authority records BETA

Neidhardt, JörgHultman, Lars

Search in DiVA

By author/editor
Neidhardt, JörgHultman, Lars
By organisation
Thin Film PhysicsThe Institute of Technology
In the same journal
Thin Solid Films
Natural Sciences

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 197 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf