Strain and texture analysis of coatings using high-energy x-rays
2003 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 94, no 1, 697-702 p.Article in journal (Refereed) Published
We investigate the internal strain and crystallographic orientation (texture) in physical-vapor deposited metal nitride coatings of TiN and CrN. A high-energy diffraction technique is presented that uses synchrotron x rays and an area detector, and which allows the strain and intensity distributions of multiple crystallographic planes to be measured by a single x-ray exposure. Unique texture states and nonlinear sin2 ψ strain distributions are observed for all coatings investigated. Quantitative analysis indicates that existing micromechanical models can reasonably predict strain and corresponding stress for mixed-hkl reflections but are inadequate for fully describing measured data. Alternative mechanisms involving deposition-induced defects are proposed.
Place, publisher, year, edition, pages
2003. Vol. 94, no 1, 697-702 p.
Engineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-30039DOI: 10.1063/1.1582351ISI: 000183642900097Local ID: 15492OAI: oai:DiVA.org:liu-30039DiVA: diva2:250859