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Shear mode AlN thin film electroacoustic resonator for biosensor applications
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Applied Physics.ORCID iD: 0000-0002-2817-3574
Uppsala universitet.
Uppsala universitet.
Uppsala universitet.
2005 (English)In: IEEE Sensors 2005,2005, 2005, p. 492-Conference paper, Published paper (Refereed)
Abstract [en]

A thin film thickness excited shear acoustic wave resonator is presented. Utilizing a newly developed reactive sputtering process AlN thin films with inclined c-axis relative to the surface normal with a mean tilt of around 30deg are successfully grown. Using the above process, a biosensor consisting of a shear mode thin film bulk acoustic resonator (FBAR) and a microfluidic transport system was fabricated. The biosensor operation in water, glycerol and albumin was characterized. The resonator had a resonance frequency of around 1.2 GHz and a Q value in water of around 150. Results concerning the stability and resolution are also presented. The results demonstrate clearly the potential of FBAR biosensors for the fabrication of highly sensitive low cost biosensors, bioanalytical tools as well as for liquid sensing in general

Place, publisher, year, edition, pages
2005. p. 492-
Keyword [en]
AlN, thin film, electroacoustic, biosensor, sensor
National Category
Natural Sciences
Identifiers
URN: urn:nbn:se:liu:diva-30831DOI: 10.1109/ICSENS.2005.1597743Local ID: 16478OAI: oai:DiVA.org:liu-30831DiVA, id: diva2:251654
Conference
IEEE Sensors 2005,2005
Available from: 2009-10-09 Created: 2009-10-09 Last updated: 2018-03-07

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Lloyd-Spets, Anita

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