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Shear mode AlN thin film electroacoustic resonator for biosensor applications
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Applied Physics .ORCID iD: 0000-0002-2817-3574
Uppsala universitet.
Uppsala universitet.
Uppsala universitet.
2005 (English)In: IEEE Sensors 2005,2005, 2005, 492- p.Conference paper (Refereed)
Place, publisher, year, edition, pages
2005. 492- p.
Keyword [en]
AlN, thin film, electroacoustic, biosensor, sensor
National Category
Natural Sciences
URN: urn:nbn:se:liu:diva-30831DOI: 0-7083-9056-3/05/20.00Local ID: 16478OAI: diva2:251654
Available from: 2009-10-09 Created: 2009-10-09 Last updated: 2014-01-09

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Lloyd-Spets, Anita
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The Institute of TechnologyApplied Physics
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