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High Power Impulse Magnetron Sputtering (HIPIMS) Pre-treatment for the Deposition of Hard Coatings
Sheffield Hallam University.
Sheffield Hallam University.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .
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2005 (English)In: 48th Annual Technical Conference Society of Vacuum Coaters,2005, 2005, 480-484 p.Conference paper, Published paper (Other academic)
Place, publisher, year, edition, pages
2005. 480-484 p.
Keyword [en]
HIPIMS, Thin films
National Category
Natural Sciences
Identifiers
URN: urn:nbn:se:liu:diva-30915Local ID: 16583OAI: oai:DiVA.org:liu-30915DiVA: diva2:251738
Available from: 2009-10-09 Created: 2009-10-09 Last updated: 2013-10-30

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Böhlmark, JohanHelmersson, Ulf

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CiteExportLink to record
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