Annealing studies of nanocomposite Ti-Si-C thin films with respect to phase stability and tribological performance
2006 (English)In: Materials Science & Engineering: A, ISSN 0921-5093, Vol. 429, no 1-2, 90-95 p.Article in journal (Refereed) Published
Nanocomposite Ti-Si-C thin films were deposited by dc magnetron sputtering from a Ti3SiC2 target onto Si(1 0 0) and high-speed steel substrates at 300 °C. The as-deposited films consisted of nanocrystalline (nc-) TiCx and amorphous (a-) SiCx, as determined by X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). Annealing in vacuum up to 1450 °C resulted in improved crystallinity and a decreased volume fraction of the amorphous phase. Additionally, differential scanning calorimetry (DSC) was used to monitor heat flows connected to the respective reactions in the material, where a broad exothermic peak attributed to grain growth of crystalline TiCx appeared, while an exothermic reaction related to the formation of Ti3SiC2 was not detected. Tribological testing in a ball-on-disk setup was conducted at room temperature, 500 and 700 °C against an alumina counterpart. The room temperature measurement resulted in a coefficient of friction value of 0.8, at elevated temperatures the coefficient of friction decreased to 0.4. © 2006 Elsevier B.V. All rights reserved.
Place, publisher, year, edition, pages
2006. Vol. 429, no 1-2, 90-95 p.
National CategoryNatural Sciences
IdentifiersURN: urn:nbn:se:liu:diva-34457DOI: 10.1016/j.msea.2006.05.053Local ID: 21494OAI: oai:DiVA.org:liu-34457DiVA: diva2:255305