Bulk wafer defects observable in vision chips
2002 (English)In: Proceeding of the 32nd European Solid-State Device Research Conference, 2002, Bologna: University of Bologna , 2002, 659-662 p.Conference paper (Refereed)
Concentric intensity stripes were observed in the images of a 512*512 pixel CMOS camera chip. By measuring wavelength dependence and intensity dependence of the stripes. and analyzing the processed wafers structurally, it was concluded that the observed patterns originate from crystal defects in the bulk of the wafer underneath the epitaxial layer.
Place, publisher, year, edition, pages
Bologna: University of Bologna , 2002. 659-662 p.
Engineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-34835Local ID: 23610ISBN: 88-900847-8-2OAI: oai:DiVA.org:liu-34835DiVA: diva2:255683
32th European Solid-State Device Research Conference, 24-26 September 2002, Firenze, Italy