liu.seSearch for publications in DiVA
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Ionized physical vapor deposition (IPVD) and especially high power impulse magnetron sputtering (HIPIMS)
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .ORCID iD: 0000-0002-1744-7322
2006 (English)In: 4e Journees detude sur les nouvelles tendances en procedes magnetron et arc pour le depot de couches minces,2006, Paris: Société Française du Vide , 2006Conference paper, Published paper (Other academic)
Place, publisher, year, edition, pages
Paris: Société Française du Vide , 2006.
National Category
Natural Sciences
Identifiers
URN: urn:nbn:se:liu:diva-35677Local ID: 28105OAI: oai:DiVA.org:liu-35677DiVA: diva2:256525
Available from: 2009-10-10 Created: 2009-10-10 Last updated: 2013-10-30

Open Access in DiVA

No full text

Other links

http://www.vide.org

Authority records BETA

Helmersson, Ulf

Search in DiVA

By author/editor
Helmersson, Ulf
By organisation
The Institute of TechnologyPlasma and Coating Physics
Natural Sciences

Search outside of DiVA

GoogleGoogle Scholar

urn-nbn

Altmetric score

urn-nbn
Total: 67 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf