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Ionized physical vapor deposition (IPVD) and especially high power impulse magnetron sputtering (HIPIMS)
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .ORCID iD: 0000-0002-1744-7322
2006 (English)In: 4e Journees detude sur les nouvelles tendances en procedes magnetron et arc pour le depot de couches minces,2006, Paris: Société Française du Vide , 2006Conference paper (Other academic)
Place, publisher, year, edition, pages
Paris: Société Française du Vide , 2006.
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Natural Sciences
URN: urn:nbn:se:liu:diva-35677Local ID: 28105OAI: diva2:256525
Available from: 2009-10-10 Created: 2009-10-10 Last updated: 2013-10-30

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Helmersson, Ulf
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The Institute of TechnologyPlasma and Coating Physics
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