liu.seSearch for publications in DiVA
Change search
ReferencesLink to record
Permanent link

Direct link
Ionized physical vapor deposition (IPVD) and especially high power impulse magnetron sputtering (HIPIMS)
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .ORCID iD: 0000-0002-1744-7322
2006 (English)In: 4e Journees detude sur les nouvelles tendances en procedes magnetron et arc pour le depot de couches minces,2006, Paris: Société Française du Vide , 2006Conference paper (Other academic)
Place, publisher, year, edition, pages
Paris: Société Française du Vide , 2006.
National Category
Natural Sciences
URN: urn:nbn:se:liu:diva-35677Local ID: 28105OAI: diva2:256525
Available from: 2009-10-10 Created: 2009-10-10 Last updated: 2013-10-30

Open Access in DiVA

No full text

Other links

Search in DiVA

By author/editor
Helmersson, Ulf
By organisation
The Institute of TechnologyPlasma and Coating Physics
Natural Sciences

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Total: 52 hits
ReferencesLink to record
Permanent link

Direct link