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Reactive Film Growth of TiN by Using High Power Impulse Magnetron Sputtering (HIPIMS)
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .
AB Sandvik Tooling.
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2006 (English)In: Society of Vacuum Coaters, 49th Annual Technical Conference Proceedings,2006, 2006, 334-337 p.Conference paper, Published paper (Other academic)
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2006. 334-337 p.
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Natural Sciences
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URN: urn:nbn:se:liu:diva-35678Local ID: 28107OAI: oai:DiVA.org:liu-35678DiVA: diva2:256526
Available from: 2009-10-10 Created: 2009-10-10 Last updated: 2013-10-30

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Böhlmark, JohanLattemann, MartinaHelmersson, Ulf

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