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In-diffusion, trapping and out-diffusion of deuterium in 4H-SiC substrates
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.
2006 (English)In: Materials Science Forum, Vols. 527-529, 2006, 637- p.Conference paper, Published paper (Refereed)
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2006. 637- p.
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Natural Sciences
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URN: urn:nbn:se:liu:diva-36568Local ID: 31653OAI: oai:DiVA.org:liu-36568DiVA: diva2:257417
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ICSCRM2005
Available from: 2009-10-10 Created: 2009-10-10 Last updated: 2010-12-15

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Forsberg, UrbanJanzén, Erik

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