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RHEED studies during growth of TiN/SiNx/TiN trilayers on MgO(001)
Luleå University of Technology.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics.ORCID iD: 0000-0002-2837-3656
Luleå University of Technology.ORCID iD: 0000-0002-2286-5588
2007 (English)In: Surface Science, ISSN 0039-6028, E-ISSN 1879-2758, Vol. 601, 2352-2356 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2007. Vol. 601, 2352-2356 p.
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Natural Sciences
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URN: urn:nbn:se:liu:diva-38400DOI: 10.1016/j.susc.2007.04.001Local ID: 44186OAI: oai:DiVA.org:liu-38400DiVA: diva2:259249
Available from: 2009-10-10 Created: 2009-10-10 Last updated: 2016-08-31

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Birch, JensHultman, LarsOdén, Magnus

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