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Silicon carbide epitaxial layer and method of producing the same
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Materials Science .
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Materials Science .
2007 (English)Patent (Other (popular science, discussion, etc.))
Place, publisher, year, edition, pages
2007.
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Natural Sciences
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URN: urn:nbn:se:liu:diva-38806Local ID: 45707OAI: oai:DiVA.org:liu-38806DiVA: diva2:259655
Patent
WO/2007/020092 (2007-02-22)
Available from: 2009-10-10 Created: 2009-10-10

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Syväjärvi, MikaelYakimova, Rositsa

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