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The plasma parameters in a high power impulse magnetron sputtering discharge (HiPIMS)
Sigurjonsson, Pall
University of Iceland.
Lundin, Daniel
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .
ORCID iD:
0000-0001-8591-1003
Helmersson, Ulf
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .
ORCID iD:
0000-0002-1744-7322
Gudmundsson, Jon Tomas
University of Iceland.
2007 (English)
In:
60th Gaseous Electronics Conference,2007, 2007
Conference paper, Published paper (Other academic)
Abstract [en]
Place, publisher, year, edition, pages
2007.
National Category
Natural Sciences
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URN:
urn:nbn:se:liu:diva-40636
Local ID: 53686
OAI: oai:DiVA.org:liu-40636
DiVA, id:
diva2:261485
Available from:
2009-10-10
Created:
2009-10-10
Last updated:
2020-11-16
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Lundin, Daniel
Helmersson, Ulf
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ieee
modern-language-association-8th-edition
vancouver
oxford
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apa
ieee
modern-language-association-8th-edition
vancouver
oxford
Other style
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de-DE
en-GB
en-US
fi-FI
nn-NO
nn-NB
sv-SE
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de-DE
en-GB
en-US
fi-FI
nn-NO
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html
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