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Hysteresis-free reactive high power impulse magnetron sputtering
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .ORCID iD: 0000-0002-1744-7322
2007 (English)In: The Symposium on Reactive Sputter Deposition,2007, 2007Conference paper, Published paper (Other academic)
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2007.
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URN: urn:nbn:se:liu:diva-40643Local ID: 53699OAI: oai:DiVA.org:liu-40643DiVA, id: diva2:261492
Available from: 2009-10-10 Created: 2009-10-10 Last updated: 2013-10-30

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Wallin, ErikHelmersson, Ulf

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