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Effect of adspecies flux on texture and structure evolution in TiN thin films deposited by pulsed i-PVD
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .ORCID iD: 0000-0002-1744-7322
2007 (English)In: International Vacuum Congress,2007, 2007Conference paper, Published paper (Other academic)
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2007.
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Natural Sciences
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URN: urn:nbn:se:liu:diva-40660Local ID: 53794OAI: oai:DiVA.org:liu-40660DiVA, id: diva2:261509
Available from: 2009-10-10 Created: 2009-10-10 Last updated: 2013-10-30

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Lattemann, MartinaHelmersson, Ulf

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Total: 69 hits
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