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Effect of adspecies flux on texture and structure evolution in TiN thin films deposited by pulsed i-PVD
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .
2007 (English)In: Symposium on Ionized Physical Vapor Deposition,2007, 2007Conference paper (Other academic)
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URN: urn:nbn:se:liu:diva-40664Local ID: 53814OAI: diva2:261513
Oral presentationAvailable from: 2009-10-10 Created: 2009-10-10

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Lattemann, Martina
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The Institute of TechnologyPlasma and Coating Physics
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