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Gas-rarefaction in High Power Impulse Magnetron Sputtering
IFM Linköping university.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .ORCID iD: 0000-0002-1744-7322
2007 (English)In: Symposium on Ionized Physical Vapor Deposition,2007, 2007Conference paper, Published paper (Other academic)
Abstract [en]

  
Place, publisher, year, edition, pages
2007.
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Natural Sciences
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URN: urn:nbn:se:liu:diva-40666Local ID: 53816OAI: oai:DiVA.org:liu-40666DiVA, id: diva2:261515
Note
Poster presentationAvailable from: 2009-10-10 Created: 2009-10-10 Last updated: 2013-10-30

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Helmersson, Ulf

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