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Electron energy in high power impulse magnetron sputtering (HiPIMS) discharge
University of Iceland.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .
University of Iceland.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .ORCID iD: 0000-0002-1744-7322
2007 (English)In: Symposium on Ionized Physical Vapor Deposition,2007, 2007Conference paper, Published paper (Other academic)
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2007.
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Natural Sciences
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URN: urn:nbn:se:liu:diva-40668Local ID: 53818OAI: oai:DiVA.org:liu-40668DiVA: diva2:261517
Note
Poster presentationAvailable from: 2009-10-10 Created: 2009-10-10 Last updated: 2013-10-30

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Lundin, DanielHelmersson, Ulf

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