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Ionized deposition using high power impulse magnetron sputtering
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .ORCID iD: 0000-0002-1744-7322
2007 (English)In: The annual one day meeting on Plasmas, Surfaces and Thin Films,2007, 2007Conference paper (Other academic)
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URN: urn:nbn:se:liu:diva-40669Local ID: 53819OAI: diva2:261518
Invited presentationAvailable from: 2009-10-10 Created: 2009-10-10 Last updated: 2013-10-30

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Helmersson, Ulf
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The Institute of TechnologyPlasma and Coating Physics
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