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Optimization of off-null ellipsometry in sensor applications
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Applied Optics .ORCID iD: 0000-0001-9229-2028
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology.
2004 (English)Article in journal (Refereed) Published
Abstract [en]

The optimization of azimuth angle settings of a polarizer-compensator-sample-analyzer off-null ellipsometric sensor system to obtain maximum intensity changes with respect to changes in the properties of a sensing layer, with and without considering changes in a reflectance, is studied. Optimal conditions in the two cases are derived analytically under the assumption that linear relationships exist among the changes in the parameters of the sensing layer. The validity of these optimal conditions is verified by numerical examples. The advantage of using ellipsometry compared with reflectometry to readout sensing information for some sensing samples is also discussed. © 2004 Optical Society of America.

Place, publisher, year, edition, pages
2004. Vol. 43, no 10, 2000-2005 p.
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Natural Sciences
Identifiers
URN: urn:nbn:se:liu:diva-41352DOI: 10.1364/AO.43.002000Local ID: 55653OAI: oai:DiVA.org:liu-41352DiVA: diva2:262204
Available from: 2009-10-10 Created: 2009-10-10 Last updated: 2013-10-14

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Wang, GuoliangArwin, HansJansson, Roger

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