Ellipsometry in Life Science
2005 (English)In: Handbook of Ellipsometry / [ed] Harland G. Tompkins and Eugene A. Irene, Norwich, NY: William Andrew Publishing/SpringerVerlag , 2005, 1, 799-855 p.Chapter in book (Other academic)
Ever progressive miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research are propelling ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, to greater popularity in a widening array of applications. Ellipsometry, without contact and non-damaging to samples, is an ideal measurement technique to determine optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications occurring today, this book provides a much needed foundation of the science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, fiber optics, biotechnology, and pharmaceuticals. Divided into four sections, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas.
Place, publisher, year, edition, pages
Norwich, NY: William Andrew Publishing/SpringerVerlag , 2005, 1. 799-855 p.
National CategoryNatural Sciences
IdentifiersURN: urn:nbn:se:liu:diva-41746Local ID: 58975ISBN: 0-8155-1499-9ISBN: 978-3-5402-2293-4OAI: oai:DiVA.org:liu-41746DiVA: diva2:262601